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解决方案

SYNOPSYS™ 15.99版本更新

The update to version 15.99 incorporates the following changes:

Features:

1. The WAP 2 pupil calculation is now more accurate in cases where the pupil aberrations are large.

2. SPS can now edit the object thickness. (But the SYS dialog is still recommended for editing object declarations.)

3. A new feature (TEC) will calculate the approximate effect on the wavefront of thermal gradients across lens surfaces in microlithography lenses with a high input illumination power.

Bugs Fixed::

1. If you ran a multiconfiguration optimization and varied the GLM in a higher configuration, while configuration 1 had a real glass assigned to the same surface, that assignment was lost.

2. IPAT did not correctly count the rays traced if you requested more than a single case. Also, the RANDOM option did not work on successive cases..

15.99、15.100 版本更新内容，请查看武汉墨光官网：http://www.asdoptics.com/news.php